SIMPLE METHOD FOR CALCULATION OF ENERGY DEPOSITION PROFILES FROM RANGE DATA OF IMPLANTED IONS

被引：9

作者：

FRITZSCHE, CR ^{[1
]}

机构：

[1] INST ANGEW FESTKORPER PHYS FRAUNHOFER GESELL,D-7800 FREIBURG,FED REP GER

来源：

APPLIED PHYSICS | 1977年 / 12卷 / 04期

关键词：

D O I：

10.1007/BF00886037

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：347 / 353

页数：7

共 10 条

[1]

ABRAMOWITZ M, 1965, HDB MATH FUNCTIONS, P297

BRICE, DK .

[3]

BRICE DK, 1971, ION IMPLANTATION, P101

GIBBONS, JF .

PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1972, 60 (09) :1062-&

GIBBONS, JF .

PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1968, 56 (03) :295-+

[6]

GIBBONS JF, 1975, PROJECTED RANGE STAT

[7]

Lindhard J., 1963, MAT FYS MEDD K DAN V, V33, P31

[8]

Robinson MT, 1970, NUCL FUSION REACT, P364

[9]

Wilson R.G., 1973, ION BEAMS

[10]

Winterbon K. B., 1975, ION IMPLANTATION RAN