OPTICAL ROUGHNESS MEASURING INSTRUMENT FOR FINE-MACHINED SURFACES

被引:48
作者
BRODMANN, R [1 ]
GERSTORFER, O [1 ]
THURN, G [1 ]
机构
[1] TECH UNIV BERLIN, INST MEASUREMENT & CONTROL, D-1000 BERLIN 12, FED REP GER
关键词
D O I
10.1117/12.7973497
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:408 / 413
页数:6
相关论文
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