DESIGN AND PERFORMANCE OF A SIMPLE SUBSTRATE HEATER FOR IN-SITU DEPOSITION OF HIGH-T(C) SUPERCONDUCTING THIN-FILMS

被引：7

作者：

KUMAR, V

GUPTA, AK

机构：

[1] National Physical Laboratory, New Delhi

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 1993年 / 4卷 / 07期

关键词：

D O I：

10.1088/0957-0233/4/7/014

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A substrate heater fabricated by welding an insulated coaxial heating element under a stainless steel plate is described. The substrates have been heated up to 800-degrees-C under 800 mTorr partial pressure of oxygen. High-T(c) superconducting thin films of Y1Ba2Cu3O7-x were deposited in situ using DC magnetron sputtering without any post annealing.

引用

页码：790 / 792

页数：3