MAGNETIC ANALYSIS OF COLUMNAR GRAIN-STRUCTURE OF OBLIQUELY DEPOSITED COBALT FILMS

被引:16
作者
ITOH, K
HARA, K
KAMIYA, M
FUJIWARA, H
OKAMOTO, K
HASHIMOTO, T
机构
[1] HIROSHIMA UNIV,FAC SCI,HIROSHIMA 730,JAPAN
[2] CHIBA UNIV,COLL ARTS & SCI,CHIBA 260,JAPAN
[3] TOTTORI UNIV,FAC EDUC,TOTTORI 860,JAPAN
关键词
D O I
10.1016/0304-8853(91)90132-T
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In order to analyse quantitatively the columnar grain structure in obliquely deposited cobalt films two anisotropy fields H(k)(1) and H(k)(2), which originate from the shape anisotropy of columnar grains, were extracted from the total magnetic anisotropy. The cobalt films were vapor deposited at an incidence angle of 60-degrees onto glass substrates kept at 213 K. The pressure during deposition was 4.0 x 10(-3) Pa. On the basis of the model that the film is composed of rectangular parallelepiped crystallites the columnar grain structure has been analysed using extracted H(k)(1) and H(k)(2), and its formation mechanism is discussed.
引用
收藏
页码:235 / 241
页数:7
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