X-RAY BRAGG-DIFFRACTION ON PERIODIC SURFACE GRATINGS

被引：44

作者：

TAPFER, L

GRAMBOW, P

机构：

[1] Max-Planck-Institut für Festkörperforschung, Stuttgart 80, D-7000

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1990年 / 50卷 / 01期

关键词：

42.10.Hc; 61.10.Pa; 78.65.-s; 78.70.Ck; 81.10.Dw;

D O I：

10.1007/BF00323945

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We report on the X-ray Bragg diffraction analysis of periodic surface gratings on (100) GaAs crystals. We show that the X-ray Bragg diffraction is a very powerful method to investigate ultrafine surface gratings and allow us to determine not only the grating period but, in particular, the width of the grooves and to characterize the quality of the sidewalls, which is not easily possible with optical methods. The X-ray diffraction on surface crystal gratings is analogue to the Fraunhofer diffraction of multiple slits or reflection gratings. © 1990 Springer-Verlag.

引用

页码：3 / 6

页数：4

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