INFRARED-ABSORPTION AND NUCLEAR-MAGNETIC-RESONANCE STUDIES OF CARBON NITRIDE THIN-FILMS PREPARED BY REACTIVE MAGNETRON SPUTTERING

Carbon nitride thin films were prepared by dc magnetron sputtering of a graphite target in a nitrogen containing gas mixture onto Si(100) substrates held at ambient temperatures. All CN(x) coatings grown to a thickness of 1.5 mum are adherent and smooth. Infrared absorption and isotropic nitrogen labeling indicate that carbon and nitrogen are chemically bonded together. Both solid-state C-13 and N-15 magic angle spinning nuclear magnetic resonance (NMR) analyses were performed. NMR measurements indicate the presence of sp2 bonded C and N.