SPUTTERING OF METALS WITH NOBLE GAS IONS - EXPERIMENT TO DETERMINE FATE OF INJECTED GAS + ITS INFLUENCE ON SPUTTERING PROCESS

被引：24

作者：

NELSON, RS

机构：

来源：

PHILOSOPHICAL MAGAZINE | 1964年 / 9卷 / 98期

关键词：

D O I：

10.1080/14786436408229198

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：343 / &

共 17 条

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