CERAMIC THIN-FILMS - FABRICATION AND APPLICATIONS

被引：198

作者：

SAYER, M

SREENIVAS, K

机构：

[1] Department of Physics, Queen's University, Kingston

来源：

SCIENCE | 1990年 / 247卷 / 4946期

关键词：

D O I：

10.1126/science.247.4946.1056

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

Ceramics are a distinct class of materials whose properties range from extreme hardness to unique electrical behavior. New methods of creating thin films of complex oxides and electronic ceramics allow the integration of these properties with semiconductor technology and raise the possibility of a new range of electronic devices.

引用

页码：1056 / 1060

页数：5

共 52 条

[1]

ALBIN DS, 1987, ADV CERAM MATER, V2, P243

[2]

ANDRADE J, 1985, SURFACE INTERFACIAL, V2

[3] PEROVSKITE-TYPE OXIDES - THE NEW APPROACH TO HIGH-TC SUPERCONDUCTIVITY [J].