IONIZATION CROSS-SECTIONS OF GAS MOLECULES FOR PLASMA CHEMISTRY

被引:27
作者
DEUTSCH, H [1 ]
SCHMIDT, M [1 ]
机构
[1] AKAD WISSENSCH DDR,ZENT INST ELEKTR PHYS,GREIFSWALD,GER DEM REP
关键词
D O I
10.1002/ctpp.19850250508
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
引用
收藏
页码:475 / 484
页数:10
相关论文
共 32 条
[1]  
Alberti R., 1974, International Journal of Mass Spectrometry and Ion Physics, V14, P89, DOI 10.1016/0020-7381(74)80064-1
[2]  
BARTMESS IE, 1983, VACUUM, V33, P149
[3]   MOLECULAR ELECTRON IONIZATION CROSS SECTIONS AT 70-EV [J].
BERAN, JA ;
KEVAN, L .
JOURNAL OF PHYSICAL CHEMISTRY, 1969, 73 (11) :3866-&
[4]  
Brehm B., 1974, International Journal of Mass Spectrometry and Ion Physics, V13, P251, DOI 10.1016/0020-7381(74)80029-X
[5]   PERFLUORO EFFECT IN PHOTOELECTRON SPECTROSCOPY .1. NON-AROMATIC MOLECULES [J].
BRUNDLE, CR ;
BASCH, H ;
ROBIN, MB ;
KEUBLER, NA .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1972, 94 (05) :1451-&
[6]   TOTAL AND PARTIAL ELECTRON COLLISIONAL IONIZATION CROSS-SECTIONS FOR CH4, C2H6, SIH4, AND SI2H6 [J].
CHATHAM, H ;
HILS, D ;
ROBERTSON, R ;
GALLAGHER, A .
JOURNAL OF CHEMICAL PHYSICS, 1984, 81 (04) :1770-1777
[7]   PHOTOELECTRON SPECTROSCOPIC MOLECULAR ORBITAL STUDY OF SF4 AND RELATED FLUOROSULFURANES [J].
COWLEY, AH ;
LATTMAN, M ;
WALKER, ML .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1979, 101 (15) :4074-4080
[8]  
DEUTSCH H, 1984, BEITR PLASMAPHYS, V24, P788
[9]   ELECTRONIC-STRUCTURE OF FLUOROBENZENES, ETHYLENE, AND TETRAFLUOROETHYLENE [J].
DUKE, CB ;
YIP, KL ;
CEASAR, GP ;
POTTS, AW ;
STREETS, DG .
JOURNAL OF CHEMICAL PHYSICS, 1977, 66 (01) :256-268
[10]  
DUSHMAN S, 1949, VACUUM TECHNIQUE