RELATIVE SPUTTERING YIELDS AND QUANTITATIVE SURFACE ANALYSIS BY AUGER-SPECTROSCOPY

被引：36

作者：

WEST, LA ^{[1
]}

机构：

[1] SANDIA LABS,EXPLORATORY MAT DIV,LIVERMORE,CA 94550

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 01期

关键词：

D O I：

10.1116/1.568849

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：198 / 203

页数：6

共 46 条

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