EVIDENCE FOR OXYGEN BUBBLES IN SUBSURFACE AL2O3 LAYERS FORMED IN ALUMINUM BY OXYGEN IMPLANTATION

被引：10

作者：

MUSKET, RG

BROWN, DW

PINIZZOTTO, RF

机构：

[1] UNIV CALIF LAWRENCE LIVERMORE NATL LAB,DEPT APPL SCI,LIVERMORE,CA 94550

[2] ULTRASTRUCT INC,RICHARDSON,TX 75081

来源：

关键词：

D O I：

10.1063/1.97593

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：379 / 381

页数：3

共 17 条

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