A PROPOSED MODULAR IMAGING-SYSTEM FOR PHOTOELECTRON AND ELECTRON-PROBE MICROSCOPY WITH ABERRATION CORRECTION, AND FOR MIRROR MICROSCOPY AND LOW-ENERGY ELECTRON-MICROSCOPY

The design of an electron microscope is proposed which introduces a hyperbolic electron mirror to provide simultaneous correction of spherical and chromatic aberration. The beam-separating system is of novel design. The instrument is modular, and can be configured to be a photoelectron microscope (PEM, also called a photoelectron emission microscope, PEEM), an electron probe, or a transmission electron microscope (TEM), all with aberration correction. By substituting a high-voltage PEM-type specimen stage for the hyperbolic mirror, the instrument becomes a mirror electron microscope (MEM) or a low-energy electron microscope (LEEM).