SURFACE-STRUCTURE OF ION-IMPLANTED SILICA GLASS

被引：25

作者：

FUKUMI, K ^{[1
]}

CHAYAHARA, A ^{[1
]}

SATOU, M ^{[1
]}

HAYAKAWA, J ^{[1
]}

HANGYO, M ^{[1
]}

NAKASHIMA, S ^{[1
]}

机构：

[1] OSAKA UNIV,FAC ENGN,DEPT APPL PHYS,SUITA,OSAKA 565,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1990年 / 29卷 / 05期

关键词：

Infrared reflection spectroscopy; Ion implantation; Raman spectroscopy; Silica glass; Structure;

D O I：

10.1143/JJAP.29.905

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The structure of silica glass implanted with O+, B+ and Ag+ at an acceleration energy of the order of MeV has been investigated by infrared reflection and Raman scattering spectroscopies. It is found that the Si–O–Si bond angle decreases with ion implantation. Three-fold siloxane rings are formed with ion implantation. It is deduced that compaction of silica glass caused by ion implantation is attributed to the decrease in the Si–O–Si bond angle and the formation of small siloxane rings. The modification of the silica glass structure caused by ion implantation is similar to that caused by neutron irradiation. © 1990 The Japan Society of Applied Physics.

引用

页码：905 / 908

页数：4

共 25 条

[1] CONTROLLED SURFACE CRYSTALLIZATION OF FUSED-SILICA BY LI+-ION IMPLANTATION [J].

ARNOLD, GW .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 47 (1-4) :15-19

[2] AGGREGATION AND MIGRATION OF ION-IMPLANTED SILVER IN LITHIA-ALUMINA-SILICA GLASS [J].

ARNOLD, GW ;

BORDERS, JA .

JOURNAL OF APPLIED PHYSICS, 1977, 48 (04) :1488-1496

[3] ION-IMPLANTATION EFFECTS IN NONCRYSTALLINE SIO2 [J].

ARNOLD, GW .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1973, NS20 (06) :220-223

[4]

ARNOLD GW, 1982, RADIAT EFF, V65, P257

[5]

ARNOLD GW, 1987, BEAM MODIFICATION MA, V2, P195

[6] NEUTRON-IRRADIATION EFFECTS AND STRUCTURE OF NONCRYSTALLINE SIO2 [J].

BATES, JB ;

HENDRICKS, RW ;

SHAFFER, LB .

JOURNAL OF CHEMICAL PHYSICS, 1974, 61 (10) :4163-4176

[7] HEAVY-METAL FLUORIDE GLASSES - MODIFICATIONS INDUCED BY ION-IMPLANTATION [J].

BATTAGLIN, G ;

BERTONCELLO, R ;

BOSCOLOBOSCOLETTO, A ;

CACCAVALE, F ;

MAZZOLDI, P ;

POLATO, P .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1989, 111 (01) :36-42

[8]

BIERSACK JP, 1987, BEAM MODIFICATION MA, V2, P698

[9]

BRINKER CJ, 1986, MATER RES SOC S P, V61, P387

[10]

CHINELLATO V, 1982, RADIAT EFF, V65, P271

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