PROGRESS IN FERROELECTRIC MEMORY TECHNOLOGY

被引:49
作者
GEIDEMAN, WA
机构
[1] McDonnell Douglas Electronic Systems Company, Santa Ana, CA 92705, 1801 E. St. Andrew Place
关键词
4;
D O I
10.1109/58.108872
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
The application of ferroelectric films to semiconductor memories is described. Nonvolatile memory using the polarization hysteresis of ferroelectric is described. Test results for a PZT films on GaAs substrate are presented.
引用
收藏
页码:704 / 711
页数:8
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