FABRICATION OF A MINIATURE-SIZE PYRAMIDAL-SHAPE DIAMOND FIELD EMITTER ARRAY

被引：14

作者：

OKANO, K

HOSHINA, K

KOIZUMI, S

ITOH, H

机构：

[1] AOYAMA GAKUIN UNIV,DEPT ELECT ENGN & ELECTR,TOKYO 157,JAPAN

[2] ELECTROTECH LAB,IBARAKI,OSAKA 305,JAPAN

来源：

IEEE ELECTRON DEVICE LETTERS | 1995年 / 16卷 / 06期

关键词：

D O I：

10.1109/55.790721

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A miniature-size pyramidal-shape diamond field emitter array has been fabricated using the mold technique, The tip radius of each pyramid was found to be less than 2000 Angstrom from SEM observation and the fabricated array was identified as diamond from the results of AES and Raman spectroscopy, The array was placed in a high vacuum pumping system with the basic pressure of 10(-7) Torr, and the emission property was measured using a Au ball anode with 100 mu m in diameter, The distance between the anode and the array was set up to 100 mu m. throughout the measurements, As a result, the emission current of 1 x 10(-6) A was observed at the applied voltage of 2400 V.

引用

页码：239 / 241

页数：3

共 12 条

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