NONLINEARITY OF THE PIEZORESISTANCE EFFECT OF P-TYPE SILICON DIFFUSED LAYERS

被引：54

作者：

YAMADA, K ^{[1
]}

NISHIHARA, M ^{[1
]}

SHIMADA, S ^{[1
]}

TANABE, M ^{[1
]}

SHIMAZOE, M ^{[1
]}

MATSUOKA, Y ^{[1
]}

机构：

[1] HITACHI LTD, NAKA WORKS, KATSUTA 312, JAPAN

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1982年 / 29卷 / 01期

关键词：

D O I：

10.1109/T-ED.1982.20660

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：71 / 77

页数：7

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