C-12(ALPHA, ALPHA)C-12 RESONANCE AS A TOOL FOR QUANTITATIVE-ANALYSIS

With the use of a backscattering geometry, the elastic C-12(alpha, alpha)C-12 resonance at 4.265 MeV can produce an increment greater than one-hundredfold over the conventional Rutherford cross-section for carbon. In addition, the signal width is 70 keV, and can be used for depth profiling as a function of ion beam energy. A modified computer simulation program that takes into account the resonance scattering process can measure carbon-containing layers with a thickness of about 1 nm. Several examples that describe the applicability of the approach are given.