ALLIGATOR - AN APPARATUS FOR ION-BEAM ASSISTED DEPOSITION WITH A BROAD-BEAM ION-SOURCE

被引：23

作者：

WITUSCHEK, H ^{[1
]}

BARTH, M ^{[1
]}

ENSINGER, W ^{[1
]}

FRECH, G ^{[1
]}

RUCK, DM ^{[1
]}

LEIBLE, KD ^{[1
]}

WOLF, GK ^{[1
]}

机构：

[1] GESELL SCHWERIONENFORSCH GMBH,W-6100 DARMSTADT,GERMANY

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 04期

关键词：

D O I：

10.1063/1.1142946

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Ion beam assisted deposition is a versatile technique for preparing thin films and coatings for various applications. Up to now a prototype setup for research purposes has been used in our laboratory. Processing of industrial standard workpieces requires a high current ion source with broad beam and high uniformity for homogeneous bombardment. In this contribution a new apparatus for large area samples will be described. It is named ALLIGATOR (German acronym of facility for ion assisted evaporation on transverse movable or rotary targets). In order to have a wide energy range available two ion sources are used. One delivers a beam energy up to 1.3 keV. The other is suitable for energies from 5 keV up to 40 keV. The "high-energy" ion source is a multicusp multiaperture source with 180-mA total current and a beam diameter of 280 mm at the target position.

引用

页码：2411 / 2413

页数：3

共 7 条

[1]

BARTH M, 1990, SURFACE MODIFICATION, V3, P195

[2]

ENSINGER W, 1992, REV SCI INS, V63

[3]

KELLER R, 1988, MULTIPLE CHARGED ION

[4]

KELLER R, 1989, PHYSICS TECHNOLOGY I

[5]

WITUSCHEK H, 1989, GSI8926 REP

[6] EQUIPMENT FOR ION-BEAM ASSISTED DEPOSITION [J].

WOLF, GK ;

ZUCHOLL, K ;

BARTH, M ;

ENSINGER, W .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4) :570-573

[7]

WOLF GK, 1986, METALOBERFLACHE, P40

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