NONDESTRUCTIVE AND QUANTITATIVE DEPTH PROFILING ANALYSIS OF ION-BOMBARDED TA2O5 SURFACES BY MEDIUM-ENERGY ION-SCATTERING SPECTROSCOPY

被引：39

作者：

LEE, JC

CHUNG, CS

KANG, HJ

KIM, YP

KIM, HK

MOON, DW

机构：

[1] KOREA RES INST STAND & SCI,SURFACE ANAL GRP,TAEJON 305606,SOUTH KOREA

[2] CHUNGBUK NATL UNIV,DEPT PHYS,CHONGJU 360763,SOUTH KOREA

[3] KOREA ADV INST SCI & TECHNOL,DEPT CERAM SCI & ENGN,TAEJON 305707,SOUTH KOREA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1995年 / 13卷 / 03期

关键词：

D O I：

10.1116/1.579559

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1325 / 1330

页数：6

共 23 条

[1]

CHEN YT, 1989, J VAC SCI TECHNOL A, V3, P1641

[2] LOW-ENERGY ION IMPACT PHENOMENA ON SINGLE-CRYSTAL SURFACES [J].

HARRISON, DE ;

KELLY, PW ;

GARRISON, BJ ;

WINOGRAD, N .

SURFACE SCIENCE, 1978, 76 (02) :311-322

[3]

Hofmann S, 1990, PRACTICAL SURFACE AN

[4]

Hofmann S., 1982, J TRACE MICROPROBE T, V1, P213

[5]

HUNT CP, 1983, SURF INTERFACE ANAL, V5, P199, DOI 10.1002/sia.740050506

[6] DYNAMIC MONTE-CARLO SIMULATION OF SURFACE-COMPOSITION CHANGES ON TIC AND AU-CU UNDER AR+ ION-BOMBARDMENT [J].

KANG, HJ ;

KIM, JH ;

KIM, YS ;

MOON, DW ;

SHIMIZU, R .

SURFACE SCIENCE, 1990, 226 (1-2) :93-100

[7] MONTE-CARLO SIMULATION APPROACH TO SPUTTERING IN MULTI-COMPONENT TARGETS [J].

KANG, HJ ;

KAWATOH, E ;

SHIMIZU, R .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (11) :1409-1416

[8] ON THE ROLE OF GIBBSIAN SEGREGATION IN CAUSING PREFERENTIAL SPUTTERING [J].

KELLY, R .

SURFACE AND INTERFACE ANALYSIS, 1985, 7 (01) :1-7

[9] ON THE PROBLEM OF WHETHER MASS OR CHEMICAL BONDING IS MORE IMPORTANT TO BOMBARDMENT-INDUCED COMPOSITIONAL CHANGES IN ALLOYS AND OXIDES [J].

KELLY, R .

SURFACE SCIENCE, 1980, 100 (01) :85-107

[10] BOMBARDMENT-INDUCED COMPOSITIONAL CHANGE WITH ALLOYS, OXIDES, OXYSALTS, AND HALIDES .2. THE ROLE OF SEGREGATION [J].

KELLY, R .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 39 (1-4) :43-56

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