A METHOD OF DETERMINING HYDROGEN IN ALUMINUM BY REMOVING SURFACE GASES WITH ION-BEAM ETCHING

被引:6
作者
KATO, Y [1 ]
KITAMURA, T [1 ]
ISOYAMA, E [1 ]
HASEGAWA, M [1 ]
MOMOSE, T [1 ]
ISHIMARU, H [1 ]
机构
[1] NATL LAB HIGH ENERGY PHYS,OHO,IBARAKI 305,JAPAN
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 06期
关键词
D O I
10.1116/1.575483
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:3111 / 3114
页数:4
相关论文
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