FABRICATION OF SUBMILLIMETER-RADIUS OPTICAL WAVE-GUIDE BENDS WITH ANISOTROPIC AND ISOTROPIC WET CHEMICAL ETCHANTS

被引：7

作者：

SETO, M

DERI, RJ

YIYAN, A

COLAS, E

TOMLINSON, WJ

BHAT, R

SHAHAR, A

机构：

[1] Bellcore, Red Bank, NJ 07701

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 1990年 / 8卷 / 02期

关键词：

D O I：

10.1109/50.47881

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Wet chemical etchants suitable for making GaAs/AIGaAs single-mode optical waveguide bends with radii as low as 300 µm for excess bend losses of 1 dB/90° and propagation losses as low as 1 dB/cm at λ = 1.5 µm are described. Additional bend losses due to modal mismatch resulting from etchant anisotropy are investigated and it is shown that in many cases such anisotropy does not limit bend performance. © 1990, IEEE

引用

收藏

页码：264 / 270

页数：7

相关论文

共 14 条

[1] GAAS GAALAS CURVED RIB WAVEGUIDES [J].

AUSTIN, MW .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1982, 18 (04) :795-800

[2]

AUSTIN MW, 1983, J LIGHTWAVE TECHNOL, V1, P236

[3] POLARIZATION, SCATTERING, AND COHERENT EFFECTS IN SEMICONDUCTOR RIB WAVE-GUIDE BENDS [J].

DERI, RJ ;

HAWKINS, RJ .

OPTICS LETTERS, 1988, 13 (10) :922-924

[4] RIB PROFILE EFFECTS ON SCATTERING IN SEMICONDUCTOR OPTICAL WAVE-GUIDES [J].

DERI, RJ ;

HAWKINS, RJ ;

KAPON, E .

APPLIED PHYSICS LETTERS, 1988, 53 (16) :1483-1485

[5] SCATTERING IN LOW-LOSS GAAS/ALGAAS RIB WAVE-GUIDES [J].

DERI, RJ ;

KAPON, E ;

SCHIAVONE, LM .

APPLIED PHYSICS LETTERS, 1987, 51 (11) :789-791

[6] BEND LOSSES IN GAAS ALGAAS OPTICAL WAVE-GUIDES [J].

DERI, RJ ;

KAPON, E ;

SCHIAVONE, LM .

ELECTRONICS LETTERS, 1987, 23 (16) :845-847

[7]

DERI RJ, 1989, PHOTONICS TECHNOL LE, V1, P46

[8] LOW-LOSS SINGLE-MODE GAAS/ALGAAS OPTICAL WAVE-GUIDES GROWN BY ORGANOMETALLIC VAPOR-PHASE EPITAXY [J].

KAPON, E ;

BHAT, R .

APPLIED PHYSICS LETTERS, 1987, 50 (23) :1628-1630

[9] HUYGENS-TYPE FORMULA FOR CURVATURE LOSS FROM DIELECTRIC WAVE-GUIDES IN OPTOELECTRONICS [J].

KENDALL, PC ;

STERN, MS ;

ROBSON, PN .

ELECTRONICS LETTERS, 1987, 23 (16) :850-851

[10]

MARCATILI EAJ, 1969, BELL SYST TECH J, V48, P2161