CHEMICAL VAPOR-DEPOSITION DIAMOND NUCLEATION INDUCED BY SP(2) CARBON ON UNSCRATCHED SILICON

被引:33
作者
PEHRSSON, PE [1 ]
GLESENER, J [1 ]
MORRISH, A [1 ]
机构
[1] USN, RES LAB, DIV OPT SCI, WASHINGTON, DC 20375 USA
关键词
D O I
10.1016/0040-6090(92)90503-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Chemical vapor deposition (CVD) diamond nucleation is enhanced on most substrates by scratching with diamond grit prior to growth. The damage induced by such scratching makes this an unsuitable technique for many applications, and sheds little light on fundamental nucleation mechanisms, since the bulk of the crystals on such substrates probably grow homoepitaxially on diamond fragments embedded in the substrate during scratching. In this paper, we describe recent results in which unscratched silicon substrates overlaid with carbon fibers undergo very rapid and heavy CVD diamond nucleation when exposed to CVD diamond growth conditions. Exposure of such fiber-treated substrates to high temperature in an ultrahigh vacuum induces the formation of etch pits and trails of particulate debris which are extremely efficient diamond nucleators. Both the pits and the debris are carbon rich, and thus satisfy two criteria for "spontaneous", i.e. non-epitaxial growth; (1) carbon saturation of the substrate surface, and (2) the presence of high-energy edge sites. The specific relationships between these characteristics and CVD diamond nucleation are discussed.
引用
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页码:81 / 90
页数:10
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