PROPERTIES OF DIAMOND-LIKE COATINGS PREPARED BY VACUUM-ARC DEPOSITION

被引：33

作者：

AKSENOV, II

STRELNITSKIJ, VE

机构：

[1] Kharkov Institute of Physics and Technology, Ukrainian S.S.R. Academy of Sciences

来源：

SURFACE & COATINGS TECHNOLOGY | 1991年 / 47卷 / 1-3期

关键词：

D O I：

10.1016/0257-8972(91)90272-X

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The results of experiments with a device consisting of a vacuum arc erosion source with a carbon plasma are reported. Some properties of diamond-like carbon coatings synthesized in this device are presented. It is demonstrated that the use of the plasma-optical separator makes it possible to produce high quality diamond-like coatings, the density (3.4 g cm-3) and electrical resistivity (10(8)OMEGA-m) of which are very similar to those of diamond. The results of X-ray electron and emission IR spectroscopy studies on the short-range order of the condensates prepared under different operating conditions are presented.

引用

页码：98 / 105

页数：8

共 7 条

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[2] LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES
ANGUS, JC
HAYMAN, CC
[J]. SCIENCE, 1988, 241 (4868) : 913 - 921
[3] BAKAJ AS, 1984, SURVEY STRUCTURAL PH
[4] EELS ANALYSIS OF VACUUM ARC-DEPOSITED DIAMOND-LIKE FILMS
BERGER, SD
MCKENZIE, DR
MARTIN, PJ
[J]. PHILOSOPHICAL MAGAZINE LETTERS, 1988, 57 (06) : 285 - 290
[5] GRAVEL LA, 1975, OPT MEKH PROMST, V2, P77
[6] KHIZHNYAK NA, 1965, ZH TEKH FIZ, V35, P847
[7] STRELNITSKIJ VE, 1978, ZH TEKH FIZ, V648, P377

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