EPITAXIAL-GROWTH OF BODY-CENTERED-CUBIC TRANSITION-METAL FILMS AND SUPERLATTICES ONTO MGO (111), (011), AND (001) SUBSTRATES

We demonstrate epitaxial growth of the bcc transition metals Nb, Mo, Fe, and Cr via sputtering onto single crystal MgO substrates. The epitaxial growth orientations are (Oil), (112), and (001) when grown onto MgO (111), (011), and (001), respectively. Further, we demonstrate that, under appropriate growth conditions, superlattices of these materials (e.g., Fe/Cr, Fe/V, and Mo/V) can be grown with the same epitaxial order as the films. © 1995, American Vacuum Society. All rights reserved.