THE ROLE OF FAST SECONDARY ELECTRONS IN DEGRADING SPATIAL-RESOLUTION IN THE ANALYTICAL ELECTRON-MICROSCOPE

被引:17
作者
JOY, DC [1 ]
NEWBURY, DE [1 ]
MYKLEBUST, RL [1 ]
机构
[1] NBS,WASHINGTON,DC 20234
来源
JOURNAL OF MICROSCOPY-OXFORD | 1982年 / 128卷 / NOV期
关键词
D O I
10.1111/j.1365-2818.1982.tb00442.x
中图分类号
TH742 [显微镜];
学科分类号
摘要
引用
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页码:RP1 / RP2
页数:2
相关论文
共 5 条
[1]  
EVANS RD, 1955, ATOMIC NUCLEUS, P576
[2]   Concerning the impact of two particles, taking into account the retardation of the forces. [J].
Moller, Christian .
ZEITSCHRIFT FUR PHYSIK, 1931, 70 (11-12) :786-795
[3]   MONTE-CARLO SIMULATION OF FAST SECONDARY-ELECTRON PRODUCTION IN ELECTRON-BEAM RESISTS [J].
MURATA, K ;
KYSER, DF ;
TING, CH .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (07) :4396-4405
[4]  
Newberrry D. E., 1979, ULTRAMICROSCOPY, V3, P391
[5]  
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