REMOVAL OF THIN (20A) LAYERS OF METALS METAL OXIDES AND CERAMICS BY MECHANICAL POLISHING

被引：51

作者：

WHITTON, JL

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1965年 / 36卷 / 12期

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D O I：

10.1063/1.1713970

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：3917 / &

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