IN-SITU STUDY OF AMORPHOUS TO CRYSTALLINE TRANSITION IN INDIUM OXIDE THIN-FILMS USING TRANSMISSION ELECTRON-MICROSCOPY

被引：11

作者：

RAUF, IA ^{[1
]}

BROWN, LM ^{[1
]}

机构：

[1] UNIV CAMBRIDGE, CAVENDISH LAB, MP GRP, CAMBRIDGE CB3 0HE, ENGLAND

来源：

ACTA METALLURGICA ET MATERIALIA | 1994年 / 42卷 / 01期

关键词：

Thin films;

D O I：

10.1016/0956-7151(94)90048-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have studied reactively evaporated thin films of amorphous indium oxide by HREM and have attempted to observe the structural changes appearing during the course of crystallization as the films are irradiated with electron beam. Two kinds of process are observed for crystallization: (i) gradual ordering over the whole of the projected area leading to crystallization with no obvious nucleation event, and (ii) nucleation and growth process.

引用

页码：57 / 64

页数：8