SIMS AND RBS INVESTIGATIONS OF IMPLANTED LAYERS

被引：4

作者：

ZAVODCHIKOV, VM

NIKITENKOV, NN

PUCHKARYOVA, LN

YATIS, AA

机构：

[1] Nuclear Physics Inst, Tomsk, USSR, Nuclear Physics Inst, Tomsk, USSR

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 17卷 / 01期

关键词：

D O I：

10.1016/0168-583X(86)90453-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：62 / 65

页数：4

共 14 条

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ANDERSEN, HH ;

BESENBACHER, F ;

LOFTAGER, P ;

MOLLER, W .

PHYSICAL REVIEW A, 1980, 21 (06) :1891-1901

[2]

ANDERSEN HH, 1984, ION IMPLANTATION BEA, P128

[3]

ANDREEV NV, 1984, 14 SOV UN C PHYS CHA, P160

[4]

BEHAR M, 1985, NUCL INSTRUM METH B, V6, P453, DOI 10.1016/0168-583X(85)90002-3

[5]

Biersack J.P., 1982, ION IMPLANTATION TEC, P122, DOI DOI 10.1007/978-3-642-68779-2_5

[6] CORRECTION OF THE RUTHERFORD SCATTERING CROSS-SECTION IN THE BACKSCATTERING ANALYSIS [J].

HAUTALA, M ;

LUOMAJARVI, M .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 45 (3-4) :159-162

[7]

KOSITSIN LG, 1983, NUCL PHYSICAL METHOD, P67

[8] HOW ACCURATE ARE ABSOLUTE RUTHERFORD BACKSCATTERING YIELDS [J].

LECUYER, J ;

DAVIES, JA ;

MATSUNAMI, N .

NUCLEAR INSTRUMENTS & METHODS, 1979, 160 (02) :337-346

[9]

LOGACHYOV EI, 1983, EXP TECHNIQUES DEVIC, V1, P21

[10]

MARWICK AD, 1983, SURFACE MODIFICATION, P211

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