REFLOW AND BURIAL OF CHANNEL WAVE-GUIDES FORMED IN SOL-GEL GLASS ON SI SUBSTRATES

被引：22

作者：

SYMS, RRA

HOLMES, AS

机构：

[1] Optical and Semiconductor Devices Section, Department of Electrical and Electronic Engineering, Imperial College of Science, Technology and Medicine

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1993年 / 5卷 / 09期

关键词：

Waveguides;

D O I：

10.1109/68.257197

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A reflow step and an improved burial procedure are demonstrated for channel waveguides formed in sol-gel glass on silicon substrates. Thick sol-gel films are deposited by repetitive spin coating and rapid thermal annealing, and etched to form ridge waveguides. Furnace heating is then used to melt both core and buffer layers simultaneously, providing a smooth surface for burial by further spin-coat deposition. Results are presented for typical core shapes, surface profiles after planarization, and optical insertion losses.

引用

页码：1077 / 1079

页数：3