HIGH-SPEED RETARDATION MODULATION ELLIPSOMETER

被引：13

作者：

MORITANI, A

OKUDA, Y

KUBO, H

NAKAI, J

机构：

来源：

APPLIED OPTICS | 1983年 / 22卷 / 16期

关键词：

D O I：

10.1364/AO.22.002429

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：2429 / 2436

页数：8

共 30 条

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