TRANSITION-METAL CONTACTS TO ATOMICALLY CLEAN SILICON

被引:46
作者
THANAILAKIS, A [1 ]
RASUL, A [1 ]
机构
[1] UNIV MANCHESTER,INST SCI & TECHNOL,DEPT ELECT ENGN & ELECTR,POB 88,MANCHESTER M60 1QD,ENGLAND
来源
JOURNAL OF PHYSICS C-SOLID STATE PHYSICS | 1976年 / 9卷 / 02期
关键词
D O I
10.1088/0022-3719/9/2/019
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
引用
收藏
页码:337 / 343
页数:7
相关论文
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