THERMAL-STABILITY OF HEAT-REFLECTIVE FILMS CONSISTING OF OXIDE-AG-OXIDE DEPOSITED BY DC MAGNETRON SPUTTERING

被引:61
作者
KUSANO, E
KAWAGUCHI, J
ENJOUJI, K
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期
关键词
D O I
10.1116/1.573658
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:2907 / 2910
页数:4
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