COMPUTATIONAL STUDIES OF HETEROGENEOUS REACTIONS OF SIH2 ON SI(111) SURFACES

被引:17
作者
AGRAWAL, PM
THOMPSON, DL
RAFF, LM
机构
关键词
D O I
10.1016/0039-6028(88)90797-2
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:283 / 306
页数:24
相关论文
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