REACTION OF SILICON WITH FILMS OF CO-NI ALLOYS - PHASE-SEPARATION OF THE MONOSILICIDES AND NUCLEATION OF THE DISILICIDES

被引：59

作者：

DHEURLE, FM ^{[1
]}

ANFITEATRO, DD ^{[1
]}

DELINE, VR ^{[1
]}

FINSTAD, TG ^{[1
]}

机构：

[1] UNIV N CAROLINA,DEPT PHYS & ASTRON,CHAPEL HILL,NC 27514

来源：

关键词：

D O I：

10.1016/0040-6090(85)90339-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：107 / 124

页数：18

共 40 条

[1] Applebaum A., 1984, J APPL PHYS, V55, P914
[2] ARONSON B, 1960, BORIDES SILICIDES TR
[3] DIFFUSION MARKER EXPERIMENTS WITH RARE-EARTH SILICIDES AND GERMANIDES - RELATIVE MOBILITIES OF THE 2 ATOM SPECIES
BAGLIN, JEE
DHEURLE, FM
PETERSSON, CS
[J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (04) : 2841 - 2846
[4] INTERFACE-MARKER TECHNIQUE APPLIED TO THE STUDY OF METAL SILICIDE GROWTH
BAGLIN, JEE
DHEURLE, FM
HAMMER, WN
PETERSSON, S
[J]. NUCLEAR INSTRUMENTS & METHODS, 1980, 168 (1-3): : 491 - 497
[5] MARKER EXPERIMENTS FOR DIFFUSION IN THE SILICIDE DURING OXIDATION OF PDSI, PD2SI, COSI2, AND NISI2 FILMS ON [SI]
BARTUR, M
NICOLET, MA
[J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (09) : 5404 - 5405
[6] BOTHA AP, 1980, THESIS U STELLENBOSC
[7] CHRISTIAN JW, 1981, THEORY TRANSFORMATIO, P424
[8] Chu WK., 1978, BACKSCATTERING SPECT
[9] SILICIDE FORMATION IN NI-SI SCHOTTKY-BARRIER DIODES
COE, DJ
RHODERICK, EH
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1976, 9 (06) : 965 - 972
[10] Czanderna A.W., 1975, METHODS SURFACE ANAL