RECENT DEVELOPMENTS IN VAPOR-PHASE AXIAL DEPOSITION

被引:16
作者
MURATA, H
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D O I
10.1109/JLT.1986.1074835
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:1026 / 1033
页数:8
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