CORRELATION OF CARBON ION ENERGY WITH SP(2)/SP(3) RATIO IN AMORPHOUS DIAMOND FILMS PRODUCED WITH A MASS-SEPARATED ION-BEAM

被引：47

作者：

HAKOVIRTA, M

SALO, J

LAPPALAINEN, R

ANTTILA, A

机构：

[1] Department of Physics, University of Helsinki, FIN-00014 Helsinki

来源：

PHYSICS LETTERS A | 1995年 / 205卷 / 04期

关键词：

AMORPHOUS CARBON FILM; ESCA; ION ENERGY; A MASS-SEPARATED ION BEAM; RESISTIVITY; SP(2)/SP(3) RATIO;

D O I：

10.1016/0375-9601(95)00559-L

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The ratio of sp(2) and sp(3) bondings in amorphous diamond films grown by a mass-separated carbon ion beam has been measured with the ESCA method. The energy of the carbon ion beam ranged from 5 to 1000 eV. The maximum of the sp(3) bondings (78%) was in the ion energy region of 40-140 eV. The results correlate well with earlier molecular dynamics simulations.

引用

页码：287 / 289

页数：3

共 9 条

[1] COMPARISON OF DIAMOND-LIKE COATINGS DEPOSITED WITH C+ AND VARIOUS HYDROCARBON ION-BEAMS [J].

ANTTILA, A ;

KOSKINEN, J ;

LAPPALAINEN, R ;

HIRVONEN, JP ;

STONE, D ;

PASZKIET, C .

APPLIED PHYSICS LETTERS, 1987, 50 (03) :132-134

[2] PROPERTIES OF FILTERED-ION-BEAM-DEPOSITED DIAMOND-LIKE CARBON AS A FUNCTION OF ION ENERGY [J].

FALLON, PJ ;

VEERASAMY, VS ;

DAVIS, CA ;

ROBERTSON, J ;

AMARATUNGA, GAJ ;

MILNE, WI ;

KOSKINEN, J .

PHYSICAL REVIEW B, 1993, 48 (07) :4777-4782

[3] NEGATIVE-ION SOURCE (NIABNIS) AND PREPARATION OF TRANSPARENT CARBON-FILMS BY NEGATIVE CARBON ION-BEAM DEPOSITION [J].

ISHIKAWA, J ;

OGAWA, K ;

MIYATA, K ;

TSUJI, H ;

TAKAGI, T .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4) :205-208

[4] MOLECULAR-DYNAMICS SIMULATION OF THE GROWTH OF DIAMOND-LIKE FILMS BY ENERGETIC CARBON-ATOM BEAMS [J].

KAUKONEN, HP ;

NIEMINEN, RM .

PHYSICAL REVIEW LETTERS, 1992, 68 (05) :620-623

[5] ABRASIVE WEAR-RESISTANCE OF ION-DEPOSITED HARD-CARBON FILMS AS A FUNCTION OF DEPOSITION ENERGY [J].

KOSKINEN, J .

JOURNAL OF APPLIED PHYSICS, 1988, 63 (06) :2094-2097

[6] EVALUATION OF THE SP2/SP3 RATIO IN AMORPHOUS-CARBON STRUCTURE BY XPS AND XAES [J].

LASCOVICH, JC ;

GIORGI, R ;

SCAGLIONE, S .

APPLIED SURFACE SCIENCE, 1991, 47 (01) :17-21

[7] SUBSTANTIATION OF SUBPLANTATION MODEL FOR DIAMOND-LIKE FILM GROWTH BY ATOMIC-FORCE MICROSCOPY [J].

LIFSHITZ, Y ;

LEMPERT, GD ;

GROSSMAN, E .

PHYSICAL REVIEW LETTERS, 1994, 72 (17) :2753-2756

[8] COMPRESSIVE-STRESS-INDUCED FORMATION OF THIN-FILM TETRAHEDRAL AMORPHOUS-CARBON [J].

MCKENZIE, DR ;

MULLER, D ;

PAILTHORPE, BA .

PHYSICAL REVIEW LETTERS, 1991, 67 (06) :773-776

[9] MOLECULAR-DYNAMICS SIMULATIONS OF ATOMIC PROCESSES AT THE LOW-TEMPERATURE DIAMOND (111) SURFACE [J].

PAILTHORPE, BA .

JOURNAL OF APPLIED PHYSICS, 1991, 70 (02) :543-547

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