DOUBLE GUN OFF-AXIS SPUTTERING OF LARGE AREA YBA2CU3O7-DELTA SUPERCONDUCTING FILMS FOR MICROWAVE APPLICATIONS

被引：51

作者：

NEWMAN, N ^{[1
]}

COLE, BF ^{[1
]}

GARRISON, SM ^{[1
]}

CHAR, K ^{[1
]}

TABER, RC ^{[1
]}

机构：

[1] HEWLETT PACKARD CO,PALO ALTO,CA 94303

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1991年 / 27卷 / 02期

关键词：

D O I：

10.1109/20.133417

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In order to extend our earlier work on in-situ off-axis sputtering to larger areas, we have used two facing targets in the off-axis configuration to produce YBa2Cu3O7-delta superconducting films with low microwave surface resistance on 5 cm diameter LaAlO3 substrates. Surface resistance (Rs) values at 10 GHz of 40+/-10-mu-OMEGA at 4.2 K and 400+/-100-mu-OMEGA at 77 K, superconducting transition temperatures of over 89 K and thickness variations of less than +/-8% are uniformally obtained over the entire 5 cm diameter area. We also report a detailed characterization of the electronic and structural properties of the films produced on the LaAlO3 substrates for a wide range of growth conditions. The role of YBCO microstructure on the transport properties and the effect of magnet geometry in the two sputter guns will also be discussed.

引用

页码：1276 / 1279

页数：4

共 14 条

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