EPITAXIAL-GROWTH OF LINBO3 THIN-FILMS BY EXCIMER LASER ABLATION METHOD AND THEIR SURFACE ACOUSTIC-WAVE PROPERTIES

被引：108

作者：

SHIBATA, Y ^{[1
]}

KAYA, K ^{[1
]}

AKASHI, K ^{[1
]}

KANAI, M ^{[1
]}

KAWAI, T ^{[1
]}

KAWAI, S ^{[1
]}

机构：

[1] OSAKA UNIV,INST SCI & IND RES,IBARAKI,OSAKA 567,JAPAN

来源：

APPLIED PHYSICS LETTERS | 1992年 / 61卷 / 08期

关键词：

D O I：

10.1063/1.107774

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have formed epitaxial LiNbO3 thin films of high quality on sapphire substrates (001) using an excimer-laser ablation technique and evaluated the surface acoustic wave (SAW) properties of these films. It is demonstrated that the LiNbO3 thin films on the sapphire are the candidates for a high frequency SAW filter because of their high velocities of propagation (5300-6600 m/s) and good temperature coefficients (- 34 to - 80 ppm/degrees-C).

引用

页码：1000 / 1002

页数：3

共 16 条

[1]

Auld B. A., 1973, ACOUSTIC FIELDS WAVE, V2, P118

[2]

AULD BA, 1973, ACOUSTIC FIELDS WAVE, V2, P386

[3] DEPOSITION AND PHYSICAL CHARACTERIZATION OF THIN-FILMS OF LITHIUM-NIOBATE ON SILICON SUBSTRATES [J].