2 TYPES OF MEV ION-BEAM ENHANCED ADHESION FOR AU FILMS ON SIO2

被引：25

作者：

WIE, CR

SHI, CR

MENDENHALL, MH

LIVI, RP

VREELAND, T

TOMBRELLO, TA

机构：

来源：

关键词：

D O I：

10.1016/0168-583X(85)90771-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：20 / 24

页数：5

共 10 条

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[3] NON-REGISTERED SILICON PRODUCED AT A METAL SILICON INTERFACE BY 14 MEV OXYGEN IONS
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[J]. APPLIED PHYSICS LETTERS, 1984, 45 (04) : 388 - 390
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[J]. INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1983, 53 (SEP): : 307 - 316
[9] TOMBRELLO TA, 1984, THIN SOLID FILMS
[10] ENHANCED ADHESION FROM HIGH-ENERGY ION IRRADIATION
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TOMBRELLO, TA
[J]. THIN SOLID FILMS, 1983, 104 (1-2) : 163 - 166