ARC-ENHANCED GLOW-DISCHARGE IN VACUUM-ARC MACHINES

被引：34

作者：

VETTER, J ^{[1
]}

BURGMER, W ^{[1
]}

PERRY, AJ ^{[1
]}

机构：

[1] AJMS CONSULTING,LOUISVILLE,CO 80027

来源：

SURFACE & COATINGS TECHNOLOGY | 1993年 / 59卷 / 1-3期

关键词：

D O I：

10.1016/0257-8972(93)90074-X

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Vacuum cathodic arc evaporation is well established for the industrial deposition of a variety of hard and metallic coatings for different applications. The standard heating and ion-cleaning processes are easily carried out by the metal ion bombardment generated by the vacuum arc. A novel method for heating and ion cleaning based on a dense argon plasma produced by the electrons from the vacuum arc is presented, namely the arc-enhanced glow discharge (AEGD). In addition to selected plasma parameters, some characteristic features of TiN coatings deposited by AEGD surface conditioning are presented.

引用

页码：152 / 155

页数：4