OPTICAL AND ELECTRICAL-PROPERTIES OF REACTIVELY DC MAGNETRON-SPUTTERED IN2O3-SN FILMS

被引:19
作者
THEUWISSEN, AJP [1 ]
DECLERCK, GJ [1 ]
机构
[1] CATHOLIC UNIV LEUVEN,DEPT ELECT ENGN,B-3030 HEVERLE,BELGIUM
关键词
D O I
10.1016/0040-6090(84)90232-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:109 / 119
页数:11
相关论文
共 15 条
  • [1] AITCHISON RE, 1954, AUSTRALIAN J APPL SC, V5, P10
  • [2] ARONSON AJ, 1979, 23RD T SPUTT SCH BOU
  • [3] BIDWELL S, 1885, PHILOS MAG, V20, P178
  • [4] REACTIVE SPUTTERING OF INDIUM TARGETS IN A DC TRIODE CONFIGURATION
    BOMCHIL, G
    BUIGUEZ, F
    MONFRET, A
    GALZIN, S
    [J]. THIN SOLID FILMS, 1977, 47 (03) : 235 - 240
  • [5] TRANSPARENT CONDUCTORS - A STATUS REVIEW
    CHOPRA, KL
    MAJOR, S
    PANDYA, DK
    [J]. THIN SOLID FILMS, 1983, 102 (01) : 1 - 46
  • [6] FRITSS CE, 1884, P AM ASS ADV SCI, V33, P97
  • [7] TRANSPARENT CONDUCTING COATINGS
    HAACKE, G
    [J]. ANNUAL REVIEW OF MATERIALS SCIENCE, 1977, 7 : 73 - 93
  • [8] HF-SPUTTERED INDIUM OXIDE-FILMS DOPED WITH TIN .1. DEPENDENCE OF ELECTRONIC TRANSPORT ON COMPOSITION OF SPUTTER GAS AND ON OXIDATION OF SURFACE
    HOFFMANN, H
    PICKL, J
    SCHMIDT, M
    KRAUSE, D
    [J]. APPLIED PHYSICS, 1978, 16 (03): : 239 - 246
  • [9] OPTICAL AND ELECTRICAL PROPERTIES OF DOPED IN2O3 FILMS
    KOSTLIN, H
    JOST, R
    LEMS, W
    [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1975, 29 (01): : 87 - 93
  • [10] CHARACTERIZATION OF TRANSPARENT CONDUCTIVE THIN-FILMS OF INDIUM OXIDE
    MOLZEN, WW
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 99 - 102