IMPROVEMENT IN DURABILITY OF COCR FILM WITH CARBON PROTECTIVE LAYER

被引:9
作者
NAGAO, M
SANO, K
KOJIMA, M
IWASAKI, H
NAHARA, A
KITAMOTO, T
机构
关键词
D O I
10.1109/TMAG.1987.1065341
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
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页码:2395 / 2397
页数:3
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