DISCHARGE CONSTRICTION, PHOTODETACHMENT, AND IONIZATION INSTABILITIES IN ELECTRON-BEAM-SUSTAINED DISCHARGE EXCIMER LASERS

被引:13
作者
KUSHNER, MJ [1 ]
PINDROH, AL [1 ]
机构
[1] SPECTRA TECHNOL INC,2755 NORTHUP WAY,BELLEVUE,WA 98004
关键词
D O I
10.1063/1.337331
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:904 / 914
页数:11
相关论文
共 28 条
[1]  
AMES WF, 1977, NUMERICAL METHODS PA, P114
[2]   INSTABILITY ONSET IN ELECTRON-BEAM-SUSTAINED KRF STAR LASER DISCHARGES [J].
BROWN, RT ;
NIGHAN, WL .
APPLIED PHYSICS LETTERS, 1978, 32 (11) :730-733
[3]   STABILITY ENHANCEMENT IN ELECTRON-BEAM-SUSTAINED EXCIMER LASER DISCHARGES [J].
BROWN, RT ;
NIGHAN, WL .
APPLIED PHYSICS LETTERS, 1979, 35 (02) :142-144
[4]   STABILITY OF TRANSVERSE SELF-SUSTAINED DISCHARGE-EXCITED LONG-PULSE XECL LASERS [J].
COUTTS, J ;
WEBB, CE .
JOURNAL OF APPLIED PHYSICS, 1986, 59 (03) :704-710
[5]   ATTACHMENT-DOMINATED ELECTRON-BEAM-IONIZED DISCHARGES [J].
DAUGHERTY, JD ;
MANGANO, JA ;
JACOB, JH .
APPLIED PHYSICS LETTERS, 1976, 28 (10) :581-583
[6]   THEORETICAL STUDIES OF UV-PREIONIZED TRANSVERSE DISCHARGE KRF AND ARF LASERS [J].
GREENE, AE ;
BRAU, CA .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1978, 14 (12) :951-957
[7]  
HAAS RA, 1982, APPLIED ATOMIC COLLI, V3, P423
[8]   CALCULATION OF ELECTRON SWARM PARAMETERS IN FLUORINE [J].
HAYASHI, M ;
NIMURA, T .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (09) :4879-4882
[9]   MODELING KRF LASER DISCHARGE [J].
JACOB, JH ;
MANGANO, JA .
APPLIED PHYSICS LETTERS, 1976, 28 (12) :724-726
[10]   PHYSICS OF THE KRYPTON FLUORIDE LASER [J].
JOHNSON, TH ;
HUNTER, AM .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (05) :2406-2420