MODIFICATION OF NON EQUILIBRIUM PROCESSES DURING THE INTERACTION BETWEEN A LOW-PRESSURE PLASMA AND A SURFACE .1. CASE OF A NH3 PLASMA - APPLICATION TO THE CHEMICAL CATALYSIS

被引：5

作者：

BERGOUGNAN, MP

GICQUEL, A

AMOUROUX, J

机构：

来源：

REVUE DE PHYSIQUE APPLIQUEE | 1983年 / 18卷 / 06期

关键词：

D O I：

10.1051/rphysap:01983001806033500

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：335 / 346

页数：12

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