SPECTRAL ELLIPSOMETRIC TEM AND ELECTRON SPECTROSCOPIC INVESTIGATIONS ON OXIDIZED ALUMINUM THIN-FILMS

被引：6

作者：

BARNA, PB ^{[1
]}

BODO, Z ^{[1
]}

GERGELY, G ^{[1
]}

ADAM, J ^{[1
]}

机构：

[1] TUNGSRAM LABS,H-1340 BUDAPEST,HUNGARY

来源：

VACUUM | 1986年 / 36卷 / 7-9期

关键词：

D O I：

10.1016/0042-207X(86)90229-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

ALUMINUM AND ALLOYS

引用

页码：465 / 469

页数：5

共 29 条

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[19] THICKNESS OF NATURAL OXIDE-FILMS DETERMINED BY AES AND XPS WITH WITHOUT SPUTTERING [J].

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