FABRICATION OF HIGH ICXRN YBCO-JOSEPHSON-JUNCTIONS ON MGO-SUBSTRATES USING A FOCUSED-ION-BEAM SYSTEM

被引：28

作者：

NEUMANN, C

YAMAGUCHI, K

HAYASHI, K

SUZUKI, K

ENOMOTO, Y

TANAKA, S

机构：

[1] Superconductivity Research Laboratory, International Superconductivity Technology Center, Koto-ku, Tokyo, 135

来源：

PHYSICA C | 1993年 / 210卷 / 1-2期

关键词：

D O I：

10.1016/0921-4534(93)90018-L

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report on the fabrication of YBCO-Josephson-junctions using a narrow-focused Ga-ion beam to damage the MgO-substrates prior to film deposition. On top of the micro-areas damaged by the ion-beam, the as-grown YBCO-film shows weak-link properties. The final junction was achieved using photolithography and Ar-milling to fabricate a 5 mum wide superconducting line over the damaged area. This method, using only standard techniques, leads to reproducible junctions with a high I(c) x R(n) product, which is important for some applications and indicates a good barrier quality.

引用

页码：138 / 146

页数：9

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