NEW ELECTRODE SEPARATION TECHNOLOGY USING ANODIC-OXIDATION AND APPLICATION TO SAW INTERDIGITAL TRANSDUCERS

By anodic oxidation of the edges of the portions of the Al film under photoresist, controllable gaps between electrodes with good insulation can be obtained. These techniques are applied to realize a new surface-acoustic-wave narrow gap interdigital transducer (NG-IDT) and narrow gap unidirectional transducer (NG-UDT). Our experimental result shows 7.2 dB insertion loss with amplitude ripples of +/- 1.2 dB for a conventional NG-IDT. Directivities of 3 dB/transducer at 440 MHz (fundamental) and 13 dB/transducer at 870 MHz (second-harmonic operation) for a new floating electrode type unidirectional transducer (NG-FEUDT) are demonstrated. Also a three transducer low loss filter using a combination of NG-IDT and NG-FEUDT exhibits 3.46 dB insertion loss at 894 MHz (second-harmonic operation, electrode width of 1.7-mu-m) with sidelobe suppression greater than 35 dB.