CHARACTERISTICS OF CLEANING AND CARBONIZING PLASMAS IN TEXTOR

被引:8
作者
AMEMIYA, H
ISHII, S
OYAMA, H
SAKAMOTO, Y
MINAGAWA, H
SATAKE, T
HASHIBA, M
YAMASHINA, T
NODA, N
HORI, Y
AKAISHI, K
MIYAHARA, A
BANNO, T
WINTER, J
HOTHKER, K
BIEGER, W
机构
[1] HOKKAIDO UNIV, FAC ENGN, KITA KU, SAPPORO, HOKKAIDO 060, JAPAN
[2] NAGOYA UNIV, INST PLASMA PHYS, CHIKUSA KU, NAGOYA, AICHI 464, JAPAN
[3] FORSCHUNGSZENTRUM JULICH, EURATOM ASSOC, INST PLASMA PHYS, D-5170 JULICH, FED REP GER
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1987年 / 26卷 / 09期
关键词
D O I
10.1143/JJAP.26.1534
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1534 / 1543
页数:10
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