共 13 条
[1]
[Anonymous], 1977, STOPPING RANGES IONS
[2]
SPUTTERING YIELDS FOR LIGHT-IONS AS A FUNCTION OF ANGLE OF INCIDENCE
[J].
APPLIED PHYSICS,
1979, 19 (04)
:421-426
[4]
BAY HL, 1980, APPL PHYS, V21, P1527
[5]
BEHRISCH R, 1967, VAKUUM TECHNIK, V16, P250
[6]
BEHRISCH R, 1981, TOPICS APPLIED PHYSI, V47
[7]
BIERSACK J, UNPUB
[8]
EUBANK H, 1979, PLASMA PHYS CONTROLL, V1, P167
[9]
Matsunami N., 1980, IPPJAM14 NAG U I PLA
[10]
OEN OS, 1976, NUCL INSTRUM METHODS, V132, P647, DOI 10.1016/0029-554X(76)90806-5