LIGHT-ION SPUTTERING FOR H, D AND HE IN THE ENERGY-RANGE OF 25 KEV TO 100 KEV

被引:21
作者
BOHDANSKY, J
CHEN, GL
ECKSTEIN, W
ROTH, J
SCHERZER, BMU
BEHRISCH, R
机构
关键词
D O I
10.1016/0022-3115(82)90295-1
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:717 / 725
页数:9
相关论文
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