CHARACTERIZATION OF OXIDE COATINGS ON GLASS

被引:6
作者
BANGE, K
机构
[1] Schott Glaswerke, R and D, Mainz, D-55127
来源
FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY | 1995年 / 353卷 / 3-4期
关键词
D O I
10.1007/BF00322044
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Some representative characteristics of oxide films deposited on glass by different techniques have been briefly described as well as several relevant methods of thin-film analysis to determine these quantities. The most powerful information obtained by some analytical techniques have been given, and some typical problems that may occur during the analysis of oxidic thin films have been discussed. With a few selected results, the potential of some modem methods has been demonstrated.
引用
收藏
页码:240 / 245
页数:6
相关论文
共 19 条
[1]   INVESTIGATIONS OF TIO2 FILMS DEPOSITED BY DIFFERENT TECHNIQUES [J].
BANGE, K ;
OTTERMANN, CR ;
ANDERSON, O ;
JESCHKOWSKI, U ;
LAUBE, M ;
FEILE, R .
THIN SOLID FILMS, 1991, 197 (1-2) :279-285
[2]  
BANGE K, 1991, SCHICHTKUNDE SCHNITT, P86
[3]  
BANGE K, 1991, BMFT13N5476 FIN REP
[4]  
BANGE K, 1990, ADV MAT, V1, P10
[5]  
Bennett J.M., 1989, SURFACE ROUGHNESS SC
[6]  
Frey H., 1987, DUNNSCHICHT TECHNOLO
[7]  
GEIGER JF, 1987, MIKROCHIM ACTA, V1, P497
[8]   CHARACTERIZATION OF TA2O5 LAYERS BY ELECTRON-SPECTROSCOPY FOR CHEMICAL-ANALYSIS RUTHERFORD BACKSCATTERING SPECTROMETRY, NUCLEAR-REACTION ANALYSIS AND OPTICAL METHODS [J].
GURTLER, K ;
BANGE, K ;
WAGNER, W ;
RAUCH, F ;
HANTSCHE, H .
THIN SOLID FILMS, 1989, 175 (1 -2 pt 2) :185-189
[10]   DENSITY, THICKNESS AND INTERFACE ROUGHNESS OF SIO2 TIO2 AND TA2O5 FILMS ON BK-7 GLASSES ANALYZED BY X-RAY REFLECTION [J].
HUPPAUFF, M ;
BANGE, K ;
LENGELER, B .
THIN SOLID FILMS, 1993, 230 (02) :191-198